Lithographic Imaging Techniques for the Formation of Nanoscopic Features
Chem Rev
.
1999 Jul 14;99(7):1801-1822.
doi: 10.1021/cr980003i.
Authors
G. M. Wallraff
1
,
W. D. Hinsberg
Affiliation
1
IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099.
PMID:
11849011
DOI:
10.1021/cr980003i
No abstract available