MeV-proton production from solid targets irradiated by 100-fs laser pulses at intensities above 1x10(20) W cm(-2) has been studied as a function of initial target thickness. For foils 100 microm thick the proton beam was characterized by an energy spectrum of temperature 1.4 MeV with a cutoff at 6.5 MeV. When the target thickness was reduced to 3 microm the temperature was 3.2+/-0.3 MeV with a cutoff at 24 MeV. These observations are consistent with modeling showing an enhanced density of MeV electrons at the rear surface for the thinnest targets, which predicts an increased acceleration and higher proton energies.