We present the study of selective adsorption and alignment behaviors of double- and multiwalled carbon nanotubes (dwCNTs and mwCNTs) on self-assembled monolayer (SAM) patterns, bare Au, and SiO2 surfaces. dwCNTs and mwCNTs exhibited stronger affinity to polar SAMs, bare Au, and SiO2 surfaces than to nonpolar SAM surfaces. Furthermore, we found the adsorption probability of smaller carbon nanotubes (CNTs) was higher than that of larger CNTs. As proof of concept, we successfully assembled and aligned dwCNTs and mwCNTs on Au and SiO2 substrates without relying on external forces and demonstrated wafer-scale fabrication of back-gate transistors based on dwCNTs with a high yield.