The surface reactions of mesoporous silica MCM-41 with a series of new trisilylamines (trisilazanes) (SiHMe2)2NSiMe2R and (SiMe2Vin)2NSiMe2R (R = indenyl, norpinanyl, chloropropyl, 3-(N-morpholin)propyl; Vin = vinyl), disilylalkylamine (SiHMe2)iPrNSiMe2(CH2)3Cl, and monosilyldialkylamines Me2NSiMe2R (R = indenyl, chloropropyl, 3-(N-morpholin)propyl) were investigated. 1H, 13C, and 29Si MAS NMR spectroscopy, nitrogen adsorption/desorption, infrared spectroscopy, and model reactions with calix[4]arene as a mimic for an oxo surface were used to clarify the chemical nature of surface-bonded silyl groups. The trisilylamines exhibited a comparatively slow surface reaction, which allowed for the adjustment of the amount of silylated and nonreacted SiOH groups and led to a stoichiometric distribution of surface functionalities. The 2:1 integral ratio of SiHMe2 and SiMe2R moieties of such trisilazanes was found to be preserved on the silica surface as indicated by microanalytical as well as 13C and 29Si MAS NMR spectroscopic data of the hybrid materials. For example, the reaction of MCM-41 with (SiHMe2)2NSiMe2(CH2)3Cl, (SiHMe2)iPrNSiMe2(CH2)3Cl, and Me2NSiMe2(CH2)3Cl provided bi- and monofunctional hybrid materials with one-third, one-half, or all chemically accessible silanol groups derivatized by chloropropyl groups, respectively. Thus, a molecular precursor strategy was developed to efficiently control the relative amount of three different surface species, SiHMe2 (or SiVinMe2), SiMe2R, and SiOH, in a single reaction step. The reaction behavior of indenyl-substituted monosilazanes and trisilazanes (R = Ind) with calix[4]arene proved that the indenyl substituent can act as a leaving group forming a dimethylsilyl species, which is anchored bipodally on the silica surface, that is, via two Si-O bonds.