Atomic-resolution spectroscopic imaging: past, present and future

J Electron Microsc (Tokyo). 2009 Jun;58(3):87-97. doi: 10.1093/jmicro/dfn030. Epub 2009 Jan 21.

Abstract

This review examines the development of atomically resolved electron energy loss spectroscopy from the first demonstration of plane-by-plane compositional profiling, through column-by-column spectroscopy to full two-dimensional and potentially three-dimensional spectroscopic imaging. Examples will be presented to highlight the increasing analytical sensitivity and image contrast obtained through each generation of aberration correction, moving towards the ultimate goal of mapping electronic structure inside materials with atomic resolution.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.