Soft-x-ray projection lithography: printing of 0.2-microm features using a 20:1 reduction

Opt Lett. 1990 May 15;15(10):529-31. doi: 10.1364/ol.15.000529.

Abstract

We demonstrate nearly diffraction-limited printing of 0.2-microm features, using soft x rays of approximately 36-nm wavelength. An open-stencil transmission mask with minimum features of 4 microm was imaged by a twentyfold-reduction Schwarzschild-type objective onto silicon wafers coated with various e-beam resists. Implications for soft-x-ray projection lithography are discussed.