The functional properties of many technological surfaces in biotechnology, electronics, and mechanical engineering depend to a large degree on the individual features of their nanoscale surface texture, which in turn is a function of the surface manufacturing process. Among these features, the surface irregularities and self-similarity structures at different spatial scales, especially in the range of 1 to 100 nm, are of high importance because they greatly affect the surface interaction forces acting at a nanoscale distance. An analytical method for parameterizing the surface irregularities and their correlations in nanosurfaces imaged by atomic force microscopy (AFM) is proposed. In this method, flicker noise spectroscopy--a statistical physics approach--is used to develop six nanometrological parameters characterizing the high-frequency contributions of jump- and spike-like irregularities into the surface texture. These contributions reflect the stochastic processes of anomalous diffusion and inertial effects, respectively, in the process of surface manufacturing. The AFM images of the texture of corrosion-resistant magnetite coatings formed on low-carbon steel in hot nitrate solutions with coating growth promoters at different temperatures are analyzed. It is shown that the parameters characterizing surface spikiness are able to quantify the effect of process temperature on the corrosion resistance of the coatings. It is suggested that these parameters can be used for predicting and characterizing the corrosion-resistant properties of magnetite coatings.