Modern technologies demand novel alloy materials for advanced devices and applications. Here we report on Low Pressure Chemical Vapor Deposition (LPCVD) of Ge2Me6 and SnMe4 leading to deposition of nanoplatelets along with nanoparticles. According to analytical techniques (Raman spectroscopy, ED, EDX, SEM and HRTEM) the nanoplatelets up to several tens of microm in length have been prepared in two alloy modifications orthorhombic Cu3Ge and hexagonal Cu86Ge14. Thickness of the nanoplatelets ranges from 50 to 150 nm. CuSn seeds served for the growth of Ge nanoparticles scattered among nanoplatelets.