Solid-immersion imaging interferometric nanoscopy to the limits of available frequency space

Yuliya Kuznetsova; Alexander Neumann; S R J Brueck

doi:10.1364/JOSAA.29.000772

Solid-immersion imaging interferometric nanoscopy to the limits of available frequency space

J Opt Soc Am A Opt Image Sci Vis. 2012 May 1;29(5):772-81. doi: 10.1364/JOSAA.29.000772.

Authors

Yuliya Kuznetsova¹, Alexander Neumann, S R J Brueck

Affiliation

¹ Center for High Technology Materials and Department of Electrical and Computer Engineering, University of New Mexico, Albuquerque, New Mexico 87106, USA.

PMID: 22561936
DOI: 10.1364/JOSAA.29.000772

Abstract

Imaging interferometric nanoscopy (IIN) is a synthetic aperture approach offering the potential of optical resolution to the linear-system limit of optics (~λ/4n). The immersion advantages of IIN can be realized if the object is in close proximity to a solid-immersion medium with illumination and collection through the substrate and coupling this radiation to air by a grating on the medium surface opposite the object. The spatial resolution as a function of the medium thickness and refractive index as well as the field-of-view of the objective optical system is derived and applied to simulations.