Flexible crossbar-structured resistive memory arrays on plastic substrates via inorganic-based laser lift-off

Adv Mater. 2014 Nov 26;26(44):7480-7. doi: 10.1002/adma.201402472. Epub 2014 Sep 8.

Abstract

Crossbar-structured memory comprising 32 × 32 arrays with one selector-one resistor (1S-1R) components are initially fabricated on a rigid substrate. They are transferred without mechanical damage via an inorganic-based laser lift-off (ILLO) process as a result of laser-material interaction. Addressing tests of the transferred memory arrays are successfully performed to verify mitigation of cross-talk on a plastic substrate.

Keywords: RRAM; flexible electronics; flexible memory; laser lift-off.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer Simulation
  • Electric Impedance
  • Electrical Equipment and Supplies*
  • Equipment Design
  • Glass
  • Lasers
  • Linear Models
  • Materials Testing
  • Microscopy, Electron, Scanning
  • Microscopy, Electron, Transmission
  • Nickel / chemistry
  • Nonlinear Dynamics
  • Plastics* / chemistry
  • Pliability*
  • Temperature
  • Titanium / chemistry

Substances

  • Plastics
  • titanium dioxide
  • Nickel
  • nickel monoxide
  • Titanium