Crack-Defined Electronic Nanogaps

Valentin Dubois; Frank Niklaus; Göran Stemme

doi:10.1002/adma.201504569

Crack-Defined Electronic Nanogaps

Adv Mater. 2016 Mar 16;28(11):2178-82. doi: 10.1002/adma.201504569. Epub 2016 Jan 19.

Authors

Valentin Dubois¹, Frank Niklaus¹, Göran Stemme¹

Affiliation

¹ Department of Micro and Nanosystems, School of Electrical Engineering, KTH Royal Institute of Technology, SE-10044, Stockholm, Sweden.

PMID: 26784270
DOI: 10.1002/adma.201504569

Abstract

Achieving near-atomic-scale electronic nanogaps in a reliable and scalable manner will facilitate fundamental advances in molecular detection, plasmonics, and nanoelectronics. Here, a method is shown for realizing crack-defined nanogaps separating TiN electrodes, allowing parallel and scalable fabrication of arrays of sub-10 nm electronic nanogaps featuring individually defined gap widths.

Keywords: arrays; crack junctions; electronic transport; nanogaps; tunnel junctions.