Oxygen and water vapor sensing properties are investigated in metal-oxide-hybrid polymer nanocomposite thin films generated by infiltration synthesis, which incorporates molecular ZnO into the matrix of SU-8 polymer, a common negative-tone photoresist. The hybrid thin films display 20-fold higher gravimetric responses to oxygen and water vapor than those of control ZnO thin films in the dark. An additional 50-500% enhanced responses are detected under UV irradiation. The overall enhanced gravimetric response in the hybrid film is attributed to the ZnO molecules distributed in the polymer matrix, whereas the UV enhancement is explained by the light-induced, reversible generation of hydrophilic fluoroantimonic acid from triarylsulfonium hexafluoroantimonate photoacids, which leads to the increased surface potential and adsorption energies for oxygen and water. A gravimetric sensor based on a series of ZnO-infiltrated SU-8 films under UV excitation enables 96% accurate classification of water and oxygen environment with sub 10 mTorr detection limits. The results demonstrate UV-induced fully reversible surface hydrophilicity of ZnO/SU-8 hybrid nanocomposites.
Keywords: QCM; SU-8; ZnO; atomic layer deposition; hybrid nanocomposite; infiltration synthesis.