Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by in situ transmission electron microscopy

Feng-Chun Hsia; Dai-Ming Tang; Wipakorn Jevasuwan; Naoki Fukata; Xin Zhou; Masanori Mitome; Yoshio Bando; Torbjörn E M Nordling; Dmitri Golberg

doi:10.1039/c8na00373d

Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by in situ transmission electron microscopy

Nanoscale Adv. 2019 Feb 26;1(5):1784-1790. doi: 10.1039/c8na00373d. eCollection 2019 May 15.

Authors

Feng-Chun Hsia^{1

2

3}, Dai-Ming Tang¹, Wipakorn Jevasuwan¹, Naoki Fukata¹, Xin Zhou¹, Masanori Mitome¹, Yoshio Bando^{1

4

5}, Torbjörn E M Nordling², Dmitri Golberg^{1

6}

Affiliations

¹ International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS) 1-1 Namiki Tsukuba Ibaraki 305-0044 Japan tang.daiming@nims.go.jp.
² Department of Mechanical Engineering, National Cheng Kung University No. 1, University Road Tainan City 701 Taiwan.
³ Advanced Research Center for Nanolithography (ARCNL) Science Park 106 Amsterdam 1098 XG The Netherlands.
⁴ Australian Institute for Innovative Materials, University of Wollongong Wollongong New South Wales 2500 Australia.
⁵ Institute of Molecular Plus, Tianjin University No. 11 Building, No. 92 Weijin Road, Nankai District Tianjin 300072 P. R. China.
⁶ School of Chemistry, Physics and Mechanical Engineering, Science and Engineering Faculty, Queensland University of Technology (QUT) 2nd George Str. Brisbane QLD 4000 Australia.

Abstract

Mechanical resonators have wide applications in sensing bio-chemical substances, and provide an accurate method to measure the intrinsic elastic properties of oscillating materials. A high resonance order with high response frequency and a small resonator mass are critical for enhancing the sensitivity and precision. Here, we report on the realization and direct observation of high-order and high-frequency silicon nanowire (Si NW) resonators. By using an oscillating electric-field for inducing a mechanical resonance of single-crystalline Si NWs inside a transmission electron microscope (TEM), we observed resonance up to the 5^th order, for both normal and parametric modes at ∼100 MHz frequencies. The precision of the resonant frequency was enhanced, as the deviation reduced from 3.14% at the 1^st order to 0.25% at the 5^th order, correlating with the increase of energy dissipation. The elastic modulus of Si NWs was measured to be ∼169 GPa in the [110] direction, and size scaling effects were found to be absent down to the ∼20 nm level.