Engineering Silk Protein to Modulate Polymorphic Transitions for Green Lithography Resists

ACS Appl Mater Interfaces. 2022 Dec 28;14(51):56623-56634. doi: 10.1021/acsami.2c17843. Epub 2022 Dec 16.

Abstract

Silk protein is being increasingly introduced as a prospective material for biomedical devices. However, a limited locus to intervene in nature-oriented silk protein makes it challenging to implement on-demand functions to silk. Here, we report how polymorphic transitions are related with molecular structures of artificially synthesized silk protein and design principles to construct a green-lithographic and high-performative protein resist. The repetition number and ratio of two major building blocks in synthesized silk protein are essential to determine the size and content of β-sheet crystallites, and radicals resulting from tyrosine cleavages by the 193 nm laser irradiation induce the β-sheet to α-helix transition. Synthesized silk is designed to exclusively comprise homogeneous building blocks and exhibit high crystallization and tyrosine-richness, thus constituting an excellent basis for developing a high-performance deep-UV photoresist. Additionally, our findings can be conjugated to design an electron-beam resist governed by the different irradiation-protein interaction mechanisms. All synthesis and lithography processes are fully water-based, promising green lithography. Using the engineered silk, a nanopatterned planar color filter showing the reduced angle dependence can be obtained. Our study provides insights into the industrial scale production of silk protein with on-demand functions.

Keywords: green photoresist; lithography; polymorphic transition; silk protein; synthetic biology.

MeSH terms

  • Molecular Structure
  • Protein Conformation, alpha-Helical
  • Protein Conformation, beta-Strand
  • Silk* / chemistry

Substances

  • Silk