An integrated ultra-high vacuum cluster for atomic-scale deposition, interface regulation, and characterization of spintronic multilayers

Houyi Cheng; Boyu Zhang; Sylvain Eimer; Yongshan Liu; Yong Xu; Pierre Vallobra; Zilu Wang; Cheng Li; Jiyao Ge; Renyou Xu; Yuxuan Yao; Xinran Wang; Yinchang Du; Xueying Zhang; Yue Zhang; Chao Zhao; Weisheng Zhao

doi:10.1063/5.0150855

An integrated ultra-high vacuum cluster for atomic-scale deposition, interface regulation, and characterization of spintronic multilayers

Rev Sci Instrum. 2023 Jul 1;94(7):075103. doi: 10.1063/5.0150855.

Authors

Houyi Cheng^{1

2

3}, Boyu Zhang^{1

2}, Sylvain Eimer^{2

3}, Yongshan Liu^{1

2}, Yong Xu^{1

2}, Pierre Vallobra², Zilu Wang¹, Cheng Li^{2

3}, Jiyao Ge^{2

3}, Renyou Xu^{1

2}, Yuxuan Yao¹, Xinran Wang¹, Yinchang Du^{2

3}, Xueying Zhang^{1

4

5}, Yue Zhang^{1

2}, Chao Zhao⁶, Weisheng Zhao^{1

2

5}

Affiliations

¹ MIIT Key Laboratory of Spintronics, School of Integrated Circuit Science and Engineering, Beihang University, Beijing 100191, China.
² Hefei Innovation Research Institute, Anhui High Reliability Chips Engineering Laboratory, Beihang University, Hefei 230013, China.
³ Truth Equipment Corporation, TREC, Hefei 230013, China.
⁴ Truth Instrument Co., Ltd., Qingdao 266000, China.
⁵ Beihang Hangzhou Innovation Institute (Yuhang), Beihang University, Hangzhou 311121, China.
⁶ Beijing Superstring Academy of Memory Technology, Beijing 100176, China.

PMID: 37432097
DOI: 10.1063/5.0150855

Abstract

The study of interface spin effects in spintronic multilayer films requires distinguishing the effects generated by different interfaces. However, testing in atmospheric conditions requires a capping layer to protect the films, which introduces new interfaces and limits the study of interface spin-dependent effects. To address this challenge, we have developed an integrated ultra-high vacuum cluster system that includes magnetron sputtering equipment, ion irradiation equipment, and time-resolved magneto-optical Kerr effect (TR-MOKE) equipment. Our sputtering system integrates 12 cathodes in a single chamber, allowing the co-sputtering of four targets. The ultimate vacuum can reach 1 × 10-10 mbar, and the deposition resolution of 0.1 nm can be achieved. Ion irradiation equipment can ionize to produce He+, and by screening and accelerating the implantation of He+ into multilayer films, ion scanning is realized, and up to 30 keV energy can be applied to the films. The TR-MOKE equipment can detect ultra-fast magnetic dynamics processes in vacuum conditions, and its external magnetic field can be rotated 360°. Our vacuum cluster system connects the three subsystems, allowing in situ film deposition, regulation, and characterization. By accurately detecting the effects of different layers, the system can distinguish the interface effects of multilayers. Experimental results demonstrate that the three subsystems can work independently or coordinate to observe the interface effects of multilayers.