Study on the influence of material properties in femtosecond laser ablation of 6H-SiC in water and SERS-based applications

Opt Express. 2024 Oct 7;32(21):37394-37417. doi: 10.1364/OE.536840.

Abstract

We report on the formation of SiC nanoparticles coated with graphene oxide layers by femtosecond (fs) laser ablation of 6H-SiC (n-type and semi-insulating V-doped) in deionized water. Distinct structural features were observed in the surrounding matrix of colloidal spherical nanoparticles. This corresponds to the formation of micro-nanostructures of silicene sheets in the colloidal suspension. Further, the formation of subwavelength (∼λ/8) high spatial frequency laser-induced periodic surface structures (HSFL) is noticed on the ablated SiC surface. The variation in the size and periodicity of LIPSS is noted among two SiC targets with different resistivities. The study continued to investigate the morphology of furnace annealed (FA) and rapid thermal annealed (RTA) Au-deposited LIPSS towards sensing applications based on the surface-enhanced Raman scattering (SERS) technique. The formation of fine spherical Au nanoparticles is observed in the case of RTA samples, which exhibited predominant SERS enhancement in trace detection of the explosive analyte, Tetryl. This study on SiC using fs laser pulses unveils the uniqueness of SiC material in the ablation process, especially in producing the LIPSS and silicon-carbon-based nanoparticles/nanostructures that can be tailored for diverse applications.