The micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within the micro resonant structure. To enhance the quality factor, these gyroscopes are typically enclosed in high-vacuum packaging. This paper investigates a wafer-level high-vacuum-packaged (<0.1 Pa) cobweb-like disk resonator gyroscope, presenting a systematic and comprehensive theoretical analysis of the energy dissipation mechanisms, including air damping, thermoelastic damping, anchor loss, and other factors. Air damping is analyzed using both a continuous fluid model and an energy transfer model. The analysis results are validated through quality factor testing on batch samples and temperature characteristic testing on individual samples. The theoretical results obtained using the energy transfer model closely match the experimental measurements, with a maximum error in the temperature coefficient of less than 2%. The findings indicate that air damping and thermoelastic damping are the predominant energy dissipation mechanisms in the cobweb-like disk resonant gyroscope under high-vacuum conditions. Consequently, optimizing the resonator to minimize thermoelastic and air damping is crucial for designing high-performance gyroscopes.
Keywords: air damping; disk resonator gyroscope; energy dissipation; thermoelastic damping.