Hybrid Metrology for Nanostructured Optical Metasurfaces.
Murataj I, Angelini A, Cara E, Porro S, Beckhoff B, Kayser Y, Hönicke P, Ciesielski R, Gollwitzer C, Soltwisch V, Perez-Murano F, Fernandez-Regulez M, Carignano S, Boarino L, Castellino M, Ferrarese Lupi F.
Murataj I, et al. Among authors: honicke p.
ACS Appl Mater Interfaces. 2023 Dec 20;15(50):57992-58002. doi: 10.1021/acsami.3c13923. Epub 2023 Nov 22.
ACS Appl Mater Interfaces. 2023.
PMID: 37991460
Free PMC article.
Review.