Low-loss SiGe waveguides for mid-infrared photonics fabricated on 200 mm wafers.
Turpaud V, Nguyen TH, Dely H, Koompai N, Bricout A, Hartmann JM, Bernier N, Krawczyk J, Lima G, Edmond S, Herth E, Alonso-Ramos C, Vivien L, Marris-Morini D.
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Opt Express. 2024 May 6;32(10):17400-17408. doi: 10.1364/OE.521925.
Opt Express. 2024.
PMID: 38858924
Free article.