Soft-x-ray projection lithography: printing of 0.2-microm features using a 20:1 reduction.
Berreman DW, Bjorkholm JE, Eichner L, Freeman RR, Jewell TE, Mansfield WM, Macdowell AA, O'Malley ML, Raab EL, Silfvast WT, Szeto LH, Tennant DM, Waskiewicz WK, White DL, Windt DL, Wood Ii OR, Bruning JH.
Berreman DW, et al. Among authors: o malley ml.
Opt Lett. 1990 May 15;15(10):529-31. doi: 10.1364/ol.15.000529.
Opt Lett. 1990.
PMID: 19767997