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Electrical characterization of single nanometer-wide Si fins in dense arrays.
Folkersma S, Bogdanowicz J, Schulze A, Favia P, Petersen DH, Hansen O, Henrichsen HH, Nielsen PF, Shiv L, Vandervorst W. Folkersma S, et al. Among authors: petersen dh. Beilstein J Nanotechnol. 2018 Jun 25;9:1863-1867. doi: 10.3762/bjnano.9.178. eCollection 2018. Beilstein J Nanotechnol. 2018. PMID: 30013880 Free PMC article.
A variable probe pitch micro-Hall effect method.
Witthøft ML, Østerberg FW, Bogdanowicz J, Lin R, Henrichsen HH, Hansen O, Petersen DH. Witthøft ML, et al. Among authors: petersen dh. Beilstein J Nanotechnol. 2018 Jul 20;9:2032-2039. doi: 10.3762/bjnano.9.192. eCollection 2018. Beilstein J Nanotechnol. 2018. PMID: 30116693 Free PMC article.
3ω correction method for eliminating resistance measurement error due to Joule heating.
Guralnik B, Hansen O, Henrichsen HH, Beltrán-Pitarch B, Østerberg FW, Shiv L, Marangoni TA, Stilling-Andersen AR, Cagliani A, Hansen MF, Nielsen PF, Oprins H, Vermeersch B, Adelmann C, Dutta S, Borup KA, Mihiretie BM, Petersen DH. Guralnik B, et al. Among authors: petersen dh. Rev Sci Instrum. 2021 Sep 1;92(9):094711. doi: 10.1063/5.0063998. Rev Sci Instrum. 2021. PMID: 34598479
Graphene conductance uniformity mapping.
Buron JD, Petersen DH, Bøggild P, Cooke DG, Hilke M, Sun J, Whiteway E, Nielsen PF, Hansen O, Yurgens A, Jepsen PU. Buron JD, et al. Among authors: petersen dh. Nano Lett. 2012 Oct 10;12(10):5074-81. doi: 10.1021/nl301551a. Epub 2012 Sep 7. Nano Lett. 2012. PMID: 22947167
Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper.
Wen LG, Roussel P, Pedreira OV, Briggs B, Groven B, Dutta S, Popovici MI, Heylen N, Ciofi I, Vanstreels K, Østerberg FW, Hansen O, Petersen DH, Opsomer K, Detavernie C, Wilson CJ, Elshocht SV, Croes K, Bömmels J, Tőkei Z, Adelmann C. Wen LG, et al. Among authors: petersen dh. ACS Appl Mater Interfaces. 2016 Oct 5;8(39):26119-26125. doi: 10.1021/acsami.6b07181. Epub 2016 Sep 21. ACS Appl Mater Interfaces. 2016. PMID: 27598509
26 results