Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition.
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Kim HJK, et al. Among authors: prinz fb.
ACS Appl Mater Interfaces. 2019 Mar 6;11(9):9594-9599. doi: 10.1021/acsami.8b21054. Epub 2019 Feb 20.
ACS Appl Mater Interfaces. 2019.
PMID: 30707831
Free PMC article.