Integrated silicon photonic MEMS.
Quack N, Takabayashi AY, Sattari H, Edinger P, Jo G, Bleiker SJ, Errando-Herranz C, Gylfason KB, Niklaus F, Khan U, Verheyen P, Mallik AK, Lee JS, Jezzini M, Morrissey P, Antony C, O'Brien P, Bogaerts W.
Quack N, et al. Among authors: gylfason kb.
Microsyst Nanoeng. 2023 Mar 20;9:27. doi: 10.1038/s41378-023-00498-z. eCollection 2023.
Microsyst Nanoeng. 2023.
PMID: 36949734
Free PMC article.