Electrical characterization of single nanometer-wide Si fins in dense arrays.
Folkersma S, Bogdanowicz J, Schulze A, Favia P, Petersen DH, Hansen O, Henrichsen HH, Nielsen PF, Shiv L, Vandervorst W.
Folkersma S, et al. Among authors: vandervorst w.
Beilstein J Nanotechnol. 2018 Jun 25;9:1863-1867. doi: 10.3762/bjnano.9.178. eCollection 2018.
Beilstein J Nanotechnol. 2018.
PMID: 30013880
Free PMC article.