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A CMOS compatible thermoelectric device made of crystalline silicon membranes with nanopores.
Nanotechnology. 2022 Sep 26;33(50). doi: 10.1088/1361-6528/ac8d12.
Nanotechnology. 2022.
PMID: 36027727
Thermoelectric characterization of crystalline nano-patterned silicon membranes.
Ikzibane H, Patil A, Canosa J, Okada E, Blandre E, Dubois E, Robillard JF.
Ikzibane H, et al.
Mater Adv. 2024 Jun 4;5(14):5998-6006. doi: 10.1039/d4ma00095a. eCollection 2024 Jul 15.
Mater Adv. 2024.
PMID: 39015394
Free PMC article.
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