Atomic Layer Deposition of Sb2 Te3 /GeTe Superlattice Film and Its Melt-Quenching-Free Phase-Transition Mechanism for Phase-Change Memory.
Yoo C, Jeon JW, Yoon S, Cheng Y, Han G, Choi W, Park B, Jeon G, Jeon S, Kim W, Zheng Y, Lee J, Ahn J, Cho S, Clendenning SB, Karpov IV, Lee YK, Choi JH, Hwang CS.
Yoo C, et al. Among authors: cheng y.
Adv Mater. 2022 Dec;34(50):e2207143. doi: 10.1002/adma.202207143. Epub 2022 Nov 3.
Adv Mater. 2022.
PMID: 36271720