Rational Strategy for Space-Confined Atomic Layer Deposition.
Kamei R, Hosomi T, Kanai M, Kanao E, Liu J, Takahashi T, Li W, Tanaka W, Nagashima K, Nakano K, Otsuka K, Kubo T, Yanagida T.
Kamei R, et al. Among authors: tanaka w.
ACS Appl Mater Interfaces. 2023 May 17;15(19):23931-23937. doi: 10.1021/acsami.3c01443. Epub 2023 May 8.
ACS Appl Mater Interfaces. 2023.
PMID: 37155349