MEMS Fabry-Perot sensor for accurate high pressure measurement up to 10 MPa.
Hu Y, Cao L, Nie S, Liu Q, Xie F, Peng X, Zhu Y, Han J, Chen X, Wang L, Liu Y, Liu T, Chen H, Wu Z.
Hu Y, et al. Among authors: nie s.
Opt Express. 2024 Oct 7;32(21):37059-37072. doi: 10.1364/OE.534552.
Opt Express. 2024.
PMID: 39573579
Free article.