Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions.
Deng K, Erofeev I, Chowdhuri AR, Philipsen H, Aabdin Z, Hartanto AW, Tjiu WW, Zhang M, Fernando D, Saidov K, Kumar K, Pacco A, Holsteyns F, Huynh HV, Mirsaidov U.
Deng K, et al. Among authors: huynh hv.
Small. 2024 Oct 22:e2406713. doi: 10.1002/smll.202406713. Online ahead of print.
Small. 2024.
PMID: 39439137